期刊
SENSORS AND ACTUATORS A-PHYSICAL
卷 302, 期 -, 页码 -出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2019.111782
关键词
Gas sensor; Optical gas sensor; Fabry-Perot interferometer; Sagnac interferometry; Mach-Zehnder interferometer; Zeolite
资金
- European Union's Horizon 2020 research and innovation programme under the Marie Skiodowska-Curie Innovative Training Network-MIGRATE (Miniaturized Gas flow foR Applications with Enhanced Thermal Effects) [643095]
y Exposure to volatile organic compounds (VOCs) is widely associated with adverse health effects. Detection and monitoring of VOCs are important for maintaining safe and healthy industrial and domestic environments. Interferometry is a highly-sensitive optical measurement technique that has been widely applied to a vast range of physical parameters from the speed of light to temperature and has also been used to detect VOCs at the sub-ppm range. Owing to the vast range of interferometer arrangements and processing techniques, this review assesses the different approaches adopted in detecting VOCs. Different interferometry arrangements including the Fabry-Perot interferometry, Sagnac interferometry and Mach-Zehnder interferometry are reviewed for VOC detection, including the different sensing films and materials employed. We present the basis of each technique, applications and limitations. The different interferometry techniques are summarized by comparing the sensitivity, limit of detection, linearity, response time and the challenges of current interferometry techniques. Lastly, prospects to realize a miniaturized, high-sensitive and multiplex interferometric sensors based on the recent technology are suggested. (C) 2019 Elsevier B.V. All rights reserved.
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