Influence of deposition temperature on amorphous Ga2O3 solar-blind ultraviolet photodetector

Solar-blind ultraviolet photodetectors have potential applications in space communication, ozone hole monitoring and missile tracking. Amorphous Ga2O3 (a-Ga2O3) films are deposited by a simple radio frequency magnetron sputtering at different deposition temperatures. Fully transparent devices on a quartz substrate are fabricated with high responsivity, wide detection range and good repeatability. With the increase of Ga2O3 deposited temperature, the concentration of oxygen vacancy increases accordingly, leading to a wide detection range from 250 to 325 nm and high responsivity (138 A W-1 at 5 V bias). The underlying mechanism has been discussed and analyzed. Our results should advance the application of a-Ga2O3-based ultraviolet photodetectors and other relevant devices.