期刊
PHYSICA B-CONDENSED MATTER
卷 574, 期 -, 页码 -出版社
ELSEVIER
DOI: 10.1016/j.physb.2019.411662
关键词
Multilayer thin films; PMA; SOT-MRAM; XPS; Spin hall angle; Second harmonics technique
资金
- Ministry of Science and Technology, Taiwan [MOST-107-3017-F-009-002]
- MOE Taiwan
In this work perpendicular magnetization of Co2FeAl (CFA) full-Heusler alloy films is achieved using rapid thermal annealing under N-2/H-2 gas flow in Si/beta-Ta(6.5 nm)/CFA(0.6-2 nm)/MgO(1.15 nm)/Pd(1 nm) heterostructures. The Al interdiffusion into MgO layer plays an important role in determining perpendicular magnetic anisotropy(PMA) and increasing the damping constant (alpha) of ultrathin CFA samples. The time of flight SIMS depth profiling along with XPS is used to study interdiffusion of Al across CFA/MgO interface. XPS analysis of Al-2p and Mg-1s spectra indicate the formation of A1(2)O(3) and MgAl2Ox oxide phases at CFA/MgO interface in addition to pure Al metal. The Slonczewski-like and the field-like SOT effective fields are quantified using second harmonics measurements. An effective spin hall angle of beta-Ta (6.5 nm) is estimated in range - 0.02 to - 0.06 for CFA layer thickness varied from 0.8 nm to 1.5 nm.
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