期刊
OPTICS LETTERS
卷 45, 期 7, 页码 1798-1801出版社
OPTICAL SOC AMER
DOI: 10.1364/OL.389702
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资金
- National Natural Science Foundation of China [61565010, 61705085, 61865007]
- National Key Research and Development Program of China [YS2018YFB110012]
- Guangdong Provincial Innovation and Entrepreneurship Project [2016ZT06D081]
- Natural Science Foundation of Yunnan Province [2018FB101]
- Key Program of Science and Technology of Yunnan Province [2019FA025]
Microlens arrays (MLAs) are widely used in optical imaging, dense wavelength division multiplexing, optical switching, and microstructure patterning, etc. However, the light modulation capability for both the conventional refractive-type MLA and planar diffractive-type MLA is still staying at the diffraction-limited scale. Here we propose and experimentally demonstrate a high numerical aperture (NA) supercritical lens (SCL) array which could achieve a sub-diffraction-limited focal spot lattice in the far field. The intensity distribution for all the focal spots has good uniformity with the lateral size around 0.45 lambda/NA (0.75X Airy unit). The elementary unit in the SCL array composes a series of concentric belts with a feature size in micrometer scale. By utilizing an ultrafast ultraviolet lithography technique, a centimeter scale SCL array could be successfully patterned within 10 mins. Our results may provide possibilities for the applications in optical nanofabrication, super-resolution imaging, and ultrafine optical manipulation. (C) 2020 Optical Society of America
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