期刊
OPTICS LETTERS
卷 45, 期 7, 页码 2128-2131出版社
OPTICAL SOC AMER
DOI: 10.1364/OL.388983
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资金
- Ministry of Science, Technology and Space
- United States-Israel Binational Science Foundation
- PetaCloud consortium of the Israeli Innovation Authority
We study experimentally the effect of oxide removal on the sub-bandgap photodetection in silicon waveguides at the telecom wavelength regime. Depassivating the device allows for the enhancement of the quantum efficiency by about 2-3 times. Furthermore, the propagation loss within the device is significantly reduced by the oxide removal. Measuring the device 60 days after the depassivation shows slight differences. We provide a possible explanation for these observations. Clearly, passivation and depassivation play an essential role in the design and the implementation of such sub-bandgap photodetector devices for applications such as on-chip light monitoring. (C) 2020 Optical Society of America
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