Third-harmonic generation in CMOS-compatible highly doped silica micro-ring resonator

We present the first demonstration of visible emission from highly doped silica glass micro-ring resonators (MRRs) through a third-harmonic generation (THG) nonlinear process. We obtain green light conversion efficiency of 2.7x10(-5) W-2 in a MRR with loaded Q-factor of 1.4x10(6) pumped in the telecom band. A thermal nonlinear model is developed to account for the in-cavity power dependence of the resonance detuning. Using the extracted thermal nonlinear coefficients, the measured TH resonance shift is calibrated by subtracting the thermal nonlinear-induced phase mismatch to obtain the theoretical threefold wavelength relationship along with the measured cubic power relationship. (C) 2020 Optical Society of America under the terms of the OSA Open Access Publishing Agreement