期刊
MATERIALS RESEARCH BULLETIN
卷 121, 期 -, 页码 -出版社
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.materresbull.2019.110624
关键词
Self pattern; Spin coating; Surface treatment; Solution-process; Oxide TFTs
资金
- Basic Science Research Program through the NRF of Korea - Ministry of Education, Science and Technology [NRF-2015R1A2A2A01003765, NRF-2018R1D1A1B07048441]
This paper reports a novel method for patterning an active layer by simple taping and spin coating without lithography equipment for solution-processed oxide thin-film transistors (TFTs) fabrication. A solution-processed self-patterned thin film could be prepared on the non-taped area by pushing the solution out from the taped area because the surface properties of SiO2 had been changed from hydrophilic to hydrophobic through the application of a polyimide (PI) tape. The electrical properties of the self-patterned ZTO TFTs proved better than those of the spin-coated TFTs, showing a saturation mobility of 2.64 cm(2)/V s, a threshold voltage of 0 V, an on-to-off current ratio of 1.55 x 10(7), and a subthreshold slope of 0.5 V/dec after 400 degrees C annealing with improved contact characteristics and bias stress stability.
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