期刊
MACROMOLECULAR MATERIALS AND ENGINEERING
卷 305, 期 4, 页码 -出版社
WILEY-V C H VERLAG GMBH
DOI: 10.1002/mame.201900853
关键词
lithography; polyethersulfone; solvent-permeable molds; super engineering plastics
Polyethersulfone (PES) with a glass transition temperature of 224 degrees C is a class of high-performance super engineering plastics with excellent heat resistance, as well as mechanical, electrical, and optical properties. However, the nanopatterning of PES using thermal nanoimprint lithography at a high temperature can induce technical difficulties. High-accuracy 900-nm line patterning of PES is fabricated 50 times using both a solvent-permeable cellulose-based mold and dimethylformamide as a dilution solvent in direct thermal nanoimprint lithography. The use of dilution solvents in PES has yet been limited in the nanoimprint lithography, and the developed processes expand the surface patterning of super engineering plastic.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据