期刊
JOURNAL OF THE EUROPEAN CERAMIC SOCIETY
卷 40, 期 16, 页码 6293-6300出版社
ELSEVIER SCI LTD
DOI: 10.1016/j.jeurceramsoc.2019.12.023
关键词
Perovskite; Oxynitride; Ferroelectric; Annealing; Intermediate phases
资金
- European Union through the European Regional Development Fund (ERDF)
- Ministry of Higher Education and Research
- Brittany Region
- Cotes d'Armor Departement through the CPER Project MATECOM
- Cotes d'Armor Departement through the CPER Project SOPHIE-STICC
- Conseil Departemental des Cotes d'Armor, Saint Brieuc Armor Agglomeration
- Syndicat de Gestion du Pole Universitaire de Saint Brieuc (France)
This study concerns STLTO compounds of the ferroelectric (Sr2Ta2O7)100(1-x)(La2Ti2O7)(x) solid solution. The purpose is to produce the STLTO composition x = 1.65 as thin films by thermal oxidation of the corresponding oxynitride composition. Indeed, the combination of an STLTO oxide target with a dioxygen-rich reactive atmosphere during the sputtering deposition leads to Sr-deficient oxide thin films, shifting composition and structure from the perovskite to the tetragonal tungsten bronze type. An alternative synthesis pathway is to first deposit, under nitrogen-rich atmosphere, stoichiometric oxynitride films and produce, by thermal annealing under air, the stoichiometric oxide. For low oxidation temperatures ([550-600 degrees C]), samples remain intact and display an oxide character but still contain a significant amount of nitrogen, they could be described as intermediate phases containing nitrogen-nitrogen pairs as demonstrated by Raman. Dielectric characteristics of these original film materials are of interest with a tunability value of 26 % at 30 kV/cm (10 kHz).
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