期刊
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
卷 28, 期 6, 页码 1100-1112出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2019.2942291
关键词
Micromechanical devices; Vibrations; Resonant frequency; Analytical models; Numerical models; Density measurement; Energy harvesting; Piezoelectric MEMS; vibration energy harvesters; T-shaped structure; high efficiency; self-supplied power management system
类别
资金
- Natural Sciences and Engineering Research Council of Canada (NSERC)
- Canada Foundation for Innovation (CFI)
- Research and Development Corporation (RDC) of Newfoundland and Labrador through the Industrial Research and Innovation Fund
- ArcticTECH R&D Award, Memorial University of Newfoundland
- CMC Microsystems
In the recent decades energy harvesting from ambient vibration by the micro-electromechanical systems (MEMS) has been recognized as a promising solution to boosting lifespan of low-power electronic devices. Apparently, highly efficient MEMS vibration harvesters with lower operational frequencies are advantageous. In this paper we propose a new mechanical structure to aim for energy conversion efficiency enhancement and operational frequency reduction for the piezoelectric MEMS vibration energy harvesters. The proposed structure has a T-shaped geometry with integration of two identical proof masses at the T-segment. Thanks to two degrees-of-freedom, in this structure both bending and torsional mode frequencies can be located close to each other. Its analytic model of frequency response is derived and then validated by finite element modeling (FEM) simulations and prototype measurements. Compared to the conventional straight cantilever configuration, our proposed T-shaped piezoelectric cantilever structure can help distribute mechanical strain in broader areas with higher magnitude and lower resonant frequency. Our analytical, numerical, and experimental studies show that the normalized power density of the proposed T-shaped harvester is 4.8 times higher than that of the conventional one, in addition to 36 resonant frequency reduction. [2019-0146]
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