期刊
JOURNAL OF CRYSTAL GROWTH
卷 531, 期 -, 页码 -出版社
ELSEVIER
DOI: 10.1016/j.jcrysgro.2019.125373
关键词
Computer simulation; Magnetic field; Mass transfer; Convection; Czochralski method
资金
- National Science Council of Taiwan, R.O.C [MOST-107-2221-E-008-054-MY2]
The effects of using a balanced/unbalanced cusp magnetic field (CMF) along with crystal-crucible counter-/iso-rotation on the heat, flow, and oxygen distributions during Czochralski (Cz) growth of an 8-inch silicon crystal are numerically investigated. One counter-rotation example is compared to iso-rotation cases. In both rotation modes, the vertical flow in the central melt region is strengthened while the buoyancy-driven melt flow is weakened under a cusp field. The CMF has a stronger effect on the oxygen content when there is a large difference in rotation rate between the crystal and the crucible (n(S) - n(C)). This is because a higher value of (n(S) - n(C)) induces stronger melt convection and hence, the Lorentz force has a more significant effect on a fast melt flow than a slow one. Although diffusion significantly influences oxygen transport in the melt at low crystal iso-rotation rates, different flow patterns and local melt velocities induced by different crystal iso-rotation speeds will modify the oxygen distribution. There is a slight change in the oxygen content at a low ingot iso-rotation rate with a CMF. In cases of iso-rotation, the radial oxygen content is enhanced more by an unbalanced CMF than a balanced one. Greater uniformity of the radial oxygen concentration is achieved applying iso-rotation with n(S) > n(C) under a CMF.
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