期刊
IEEE TRANSACTIONS ON ELECTRON DEVICES
卷 67, 期 3, 页码 1176-1182出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/TED.2020.2968838
关键词
Ammonia sensor; first-order differential (FOD); platinum (Pt) nanoparticle (NP); rapid thermal evaporation (RTE); shape-preserving piecewise cubic interpolation (SPPCI); surface area; volume ratio; tungsten trioxide (WO3)
资金
- [MOST 108-221-E-006-045]
An interesting ammonia (NH3) sensor based on a tungsten trioxide (WO3) thin film decorated with platinum (Pt) nanoparticles (NPs) is fabricated and demonstrated herein. Pt NPs are prepared by a rapid thermal evaporation (RTE) approach. The small size of these Pt NPs causes an increased surface area/volume (S-A/V) ratio and enhanced sensing performance. The experimental results indicate good properties, including a higher sensing response of 72.61 under 1000 ppm NH3/air gas, a lower optimum operating temperature of 225 degrees C, and a lower detecting limit (<= 1 ppm NH3/air). The studied device also has the advantages of a simple structure, easy fabrication, relatively low cost, a wide concentration detection range, and stable sensing performance. In addition, a first-order differential (FOD) and shape-preserving piecewise cubic interpolation (SPPCI) algorithms are employed to effectively reduce the redundant results and recover the reduced data for wireless transmission application. Thus, the studied Pt NP/WO3 thin film-based device shows a promise for high-performance ammonia sensing applications.
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