4.7 Article

Low Threshold Quantum Dot Lasers Directly Grown on Unpatterned Quasi-Nominal (001) Si

出版社

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JSTQE.2020.2964381

关键词

Integrated optoelectronics; quantum dots; wafer; scale integration

资金

  1. Advanced Research Projects Agency-Energy (ARPA-E), U.S. Department of Energy [DE-AR0001042]
  2. Research Grants Council of Hong Kong [16245216]
  3. Innovation Technology Fund of Hong Kong [ITS/273/16FP]

向作者/读者索取更多资源

We report electrically pumped, continuous-wave (cw) InAs& x002F;GaAs quantum dot (QD) lasers directly grown on quasi-nominal Si (001) substrates with offcut angle as small as 0.4& x00B0;. No GaP, Ge buffer layers or substrate patterning is required. An anti-phase boundary free epitaxial GaAs film was grown by metal-organic chemical vapor deposition (MOCVD) with a low threading dislocation density of 3 & x00D7; 10(7) cm(-2). Room-temperature cw lasing at similar to 1.3& x00A0;& x03BC;m has been achieved, with a minimum threshold current density of 34.6 A& x002F;cm(2) per layer, a maximum operating temperature of 80& x00A0;& x00B0;C, and a maximum single facet output power of 52 mW. A comparison of various monolithic III-V hetero-epitaxy on Si solutions is presented. Direct growth on unpatterned quasi-nominal (001) Si may yield the best material quality at the lowest lifecycle cost.

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