Electrical readout/characterization of single crystal diamond (SCD) cantilever resonators

We report on the electrical readout of the resonance frequency from single crystal diamond (SCD) cantilever resonators. Due to the deep nature of the dopants in SCD, metallic electrodes with nanometer thickness are deposited on the SCD resonators as piezoresistor for sensing. A cantilever sample with resonance frequency 411.48 kHz and Q factor around 16,000 at RT is demonstrated through the electrical readout. Because of the thin film nature of the sensing electrodes, little energy dissipation is imposed to the SCD cantilever. Frequency shifting due to the change of readout voltage is also investigated. The present work provides the avenue for the applications of SCD MEMS sensors with other circuits.