期刊
ACS APPLIED MATERIALS & INTERFACES
卷 12, 期 4, 页码 4732-4740出版社
AMER CHEMICAL SOC
DOI: 10.1021/acsami.9b18555
关键词
quartz; silicon; epitaxial growth; thin films; piezoelectricity; nanostructuration
资金
- European Research Council (ERC) under the European Union's Horizon 2020 research and innovation program, project SENSiSOFT [803004]
- French Agence Nationale pour la Recherche (ANR) [Q-NOSS ANR ANR-16-CE09-0006-01]
- Spanish Ministry of Science Innovation and Universities
- European social funds through the Severo Ochoa Program for Centers of Excellence in RD [SEV-2015-0496]
- European social funds through the Ramon y Cajal program [RyC-2012-11709]
- Generalitat de Catalunya [2017SGR00765]
- China Scholarship Council (CSC) [201506060170]
- Sorbonne Universite
- CNRS
- C'Nano projects of the Region Ile-de-France
- European Research Council (ERC) [803004] Funding Source: European Research Council (ERC)
The monolithic integration of sub-micron quartz structures on silicon substrates is a key issue for the future development of piezoelectric devices as prospective sensors with applications based on the operation in the high-frequency range. However, to date, it has not been possible to make existing quartz manufacturing methods compatible with integration on silicon and structuration by top-down lithographic techniques. Here, we report an unprecedented large-scale fabrication of ordered arrays of piezoelectric epitaxial quartz nanostructures on silicon substrates by the combination of soft-chemistry and three lithographic techniques: (i) laser interference lithography, (ii) soft nanoimprint lithography on Sr-doped SiO2 sol-gel thin films, and (iii) self-assembled SrCO3 nanoparticle reactive nanomasks. Epitaxial a-quartz nanopillars with different diameters (from 1 mu m down to 50 nm) and heights (up to 2 mu m) were obtained. This work demonstrates the complementarity of soft-chemistry and top-down lithographic techniques for the patterning of epitaxial quartz thin films on silicon while preserving its epitaxial crystallinity and piezoelectric properties. These results open up the opportunity to develop a cost-effective on-chip integration of nanostructured piezoelectric alpha-quartz MEMS with enhanced sensing properties of relevance in different fields of application.
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