期刊
MATERIALS RESEARCH EXPRESS
卷 6, 期 11, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.1088/2053-1591/ab5122
关键词
TiAlSiN nanocomposite coatings; deep oscillation magnetron sputtering; scratch response; tribological properties
资金
- State Scholarship Fund - China Scholarship Council
- 2020 Mengya talent plan - Beijing Academy of Science and technology
TiAlSiN nanocomposite coatings were deposited using deep oscillation magnetron sputtering with various nitrogen flow ratio (f(N2)) of 0%?20%. The increase of f(N2) promotes phase separation from a single crystallographic TiAlSi to nc-(Ti,Al)N/a-Si3N4 phase. The introduce of N content leads to the formation of refined grain size, smooth morphologies and dense microstructure. Ti0.15Al0.39Si0.07N0.39 coatings with (Al;+;Si)/Ti ratio of 2.9 deposited at f(N2);=;10% reach the highest hardness of 32.8 GPa, H/E* of and 0.0837 and H-3/E*(2) of 0.23. The introduce of N leads to failure mode changing from brittle tensile cracking (through-thickness cracking) to buckle spallation (interfacial failure). Ti0.15Al0.39Si0.07N0.39 coatings with highest H, H/E* and H-3/E*(2) ratios show buckling failure with high L-C1 of 25.4 N and L-C3 of 43.6 N. Correspondingly, Ti0.15Al0.39Si0.07N0.39 coatings are subjected to oxidation wear with low coefficient of friction of 0.41 and specific wear rate of 0.39;;10(?6) mm(3) N-?1 m(?1).
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据