期刊
SENSORS AND ACTUATORS A-PHYSICAL
卷 303, 期 -, 页码 -出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2019.111700
关键词
Amorphous carbon film; Piezo-resistive effect; MEMS; Force sensor; Gauge factor
资金
- National Nature Science Foundation of China [51805425, U1505244, 51602319]
- National Nature Science Foundation of Shaanxi Province [2018JQ5018]
- Ningbo Science and Technology Innovation Project [2018B10014]
- Fundamental Research Funds for the Central Universities [xzy022019038, xjj2018046]
The rapid growing demand of micro-electromechanical system (MEMS) sensors brings an urgent need for high performance and low cost sensitive materials. In this work, amorphous carbon (a-C) film was in-situ deposited on silicon substrate as strain sensitive component using economical direct current (DC) magnetron sputtering process and the a-C sensor was systematically designed, fabricated and tested. By adjusting the negative bias voltage in the range of 0-400 V, the gauge factor (GF) of the a-C film was adjusted within the range of 3.3-6.9. What's more, the film's sp(2) cluster size played an important role in their piezo-resistive performance and conductivity, which illustrated the thick-film resistors (TFRs) theory. Additionally, CAFM results also supported the applying of TFRs theory in this work. Benefiting from the outstanding performance of a-C film, the MEMS force sensor, consisted a Wheatstone full-bridge with four a-C piezo-resistors, had a sensitivity of 9.8 mu V/V/mN and non-linearity about 2.0% FS in the testing range of 0-210 mN, while it also showed a good repeatability. These investigations provided deeper insight into the piezo-resistive behavior of a-C film and contributed to the development of high performance and more economical sensitive materials for MEMS sensors. (C) 2019 Elsevier B.V. All rights reserved.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据