期刊
SCIENCE
卷 366, 期 6467, 页码 860-+出版社
AMER ASSOC ADVANCEMENT SCIENCE
DOI: 10.1126/science.aay8645
关键词
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资金
- ERC grant PLASILOR [640478]
- University of Maryland
- National Institute of Standards and Technology Physical Measurement Laboratory through the University of Maryland [70NANB14H209]
- Hans-Eggenberger Foundation
- SNSF Ambizione grant [173996]
Combining reprogrammable optical networks with complementary metal-oxide semiconductor (CMOS) electronics is expected to provide a platform for technological developments in on-chip integrated optoelectronics. We demonstrate how opto-electro-mechanical effects in micrometer-scale hybrid photonic-plasmonic structures enable light switching under CMOS voltages and low optical losses (0.1 decibel). Rapid (for example, tens of nanoseconds) switching is achieved by an electrostatic, nanometer-scale perturbation of a thin, and thus low-mass, gold membrane that forms an air-gap hybrid photonic-plasmonic waveguide. Confinement of the plasmonic portion of the light to the variable-height air gap yields a strong opto-electro-mechanical effect, while photonic confinement of the rest of the light minimizes optical losses. The demonstrated hybrid architecture provides a route to develop applications for CMOS-integrated, reprogrammable optical systems such as optical neural networks for deep learning.
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