期刊
QUANTUM ELECTRONICS
卷 49, 期 11, 页码 1036-1044出版社
TURPION LTD
DOI: 10.1070/QEL17021
关键词
electro-optical modulator; silicon-on-insulator; p - n junction; numerical simulation; integrated optics; radio photonics
资金
- Synopsys, Inc.
- Ministry of Science and Higher Education of the Russian Federation [RFMEFI58117X0026]
We report the results of numerical simulation of a Mach-Zehnder electro-optical modulator using beam splitters based on multimode interference in a silicon-on-insulator structure. The control is provided due to the depletion effect in the vertical p - n junction, which can be fabricated using the self-alignment technology. An optimal modulator design is proposed, which impedance is matched with an external 50-Omega load, for which, with a reverse bias of -5 V and an active length of 1.7 mm, the optical frequency bandwidth of similar to 50 GHz can be achieved. A special doping profile of the p - n junction of the modulator is presented, which provides an optical frequency bandwidth of 30 GHz with a reverse bias of -3 V and a modulator length of 2.5 mm. Such modulators can be used in integrated optics, optical communications and radio photonics devices.
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