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Nanosecond pulsed streamer discharges Part I: Generation, source-plasma interaction and energy-efficiency optimization

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IOP PUBLISHING LTD
DOI: 10.1088/1361-6595/ab53c5

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pulsed discharge; plasma processing; nanosecond pulses; pulsed power technology

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Streamer discharges generated by nanosecond high-voltage pulses have gained attraction for a variety of reasons, but mainly because they are very efficient for a number of plasma-processing applications. More specifically, researchers have noted that the pulse duration and the rise time of the applied high-voltage pulse have a significant influence on the radical yield of the transient plasmas generated with these pulses; shorter pulses result in higher yields. With the need to study transient plasmas generated by these short pulses comes the need to understand how to generate those pulses and to understand the interaction between the pulse source and the discharge. In this topical review, we will explore the different methods with which to generate nanosecond highvoltage pulses, how the interaction between the pulse source and the discharge may influence the source and the discharge and how to optimize the energy transfer from the pulse source to the discharge.

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