期刊
OPTICS LETTERS
卷 44, 期 21, 页码 5322-5325出版社
OPTICAL SOC AMER
DOI: 10.1364/OL.44.005322
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资金
- National Key RD Program of China [2017YFB1002501]
- 863 Program [2013AA014402]
- National Natural Science Foundation of China [61728402]
- Research Program of Shanghai Science and Technology Committee [17JC1402800]
In this Letter, a novel humidity sensor based on a chip-scale silicon nanobeam cavity with polymethyl methacrylate (PMMA) cladding is demonstrated. This sensor is easy to fabricate and compatible with CMOS technology. It shows a humidity sensing with a linear wavelength dependence of 22.9 pm/% relative humidity (RH) in a wide range of RH from 10% to 85%, an ultra-fast response time of 540 ms, and high stability. After annealing, the sensor exhibits high reversibility, repeatability, and temperature insensitivity at the range of 25 degrees C-40 degrees C. To the best of our knowledge, this is the first application of integrated photonics in high performance humidity detection. It provides a new way for the chip-scale sensor to integrate with photonic devices and optical systems. (C) 2019 Optical Society of America
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