期刊
INTEGRATED FERROELECTRICS
卷 201, 期 1, 页码 94-109出版社
TAYLOR & FRANCIS LTD
DOI: 10.1080/10584587.2019.1668694
关键词
Piezoelectric; actuator; bimorph; deformation; piezoelectricity; sensor
Piezoelectric actuators are widely used in many fields such as medical instruments, optics, and aerospace due to their small size and high reliability. Piezoelectric cantilever actuators are used in different configurations such as unimorph and bimorph. In this paper, a 3-D lead zirconate titanate (PZT) bimorph was modeled in COMSOL Multiphysics software for investigation of series and parallel configuration. Theoretical analysis has been developed for the measurement of deformation of a piezoelectric cantilever in inverse piezoelectric effect. The experiment was also performed to examine the deformation of piezoelectric bimorph cantilever. It is found that under a constant applied electric field of 100 V bimorph piezoelectric actuator produces maximum deformation at 100 mm length, 30 mm width, and 20 mm thickness. It is also found that piezoelectric series benders have relatively less deformation than piezoelectric parallel benders. Experimental results show good agreement with theoretical and Numerical results.
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