期刊
CURRENT APPLIED PHYSICS
卷 19, 期 11, 页码 1296-1304出版社
ELSEVIER
DOI: 10.1016/j.cap.2019.08.008
关键词
Atmospheric plasma; Chemical vapor deposition; TiO2; Titanium dioxide; OES
资金
- Basic Science Research Program through the National Research Foundation of Korea (NRF) - Ministry of Education [NRF-2017R1D1A1B03029401]
- Chonbuk National University
TiO2 thin films are applied in various domains, e.g. air or water purification, self-cleaning surfaces etc. The deposition of titanium dioxide at industrial scale remains challenging. Atmospheric pressure plasma chemical vapor deposition methods are currently developed to provide an easy and viable method for deposition at industrial scale. Even though those methods lead to promising applicative coatings their formation mechanisms remain poorly investigated. In order to investigate the effect of the plasma parameters, i.e. plasma power and introduction of oxygen, on the plasma chemistry, optical emission spectroscopy (OES) is employed to monitor the various species present in the discharge. X-ray Photoelectron Spectroscopy (XPS) analyses of the deposited thin films are carried out and show that by either decreasing the plasma power or introducing oxygen the carbon impurities in the layer can be reduced. By comparing OES and XPS data, the ratio of carbon containing species (CH and C-2) to oxygen, i.e. I-CH/I-O or I-C2/I-O, in the discharge is shown to be related to the carbon/oxygen composition ratio in the layer.
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