期刊
APPLIED SURFACE SCIENCE
卷 494, 期 -, 页码 285-292出版社
ELSEVIER
DOI: 10.1016/j.apsusc.2019.07.072
关键词
InGaN; Nonradiative recombination reduction; Hydrogen; Hillock-like In-rich regions; V-pits
类别
资金
- Science and Technology Major Project of Guangdong Province, China [2015B010112001]
- Guangdong Natural Science Foundation [2015A030312011]
Nonradiative recombination in InGaN epilayers grown by metal-organic chemical vapor deposition has been investigated. Time-resolved photoluminescence measurements show that the nonradiative recombination is suppressed with the periodical dilute H-2 carrier gas. Space-resolved cathodoluminescence images indicate that clustered V-pits in hillock-like In-rich regions and scattered V-pits primarily contribute to the nonradiative recombination. The number and size of hillock-like In-rich regions as well as the density of scattered V-pits are effectively reduced by the periodical introduction of dilute H-2 carrier gas, leading to a significant reduction of the nonradiative recombination. Transmission electron microscopy shows that the basal plane stacking faults, which are considered as the origins of the hillock-like In-rich regions, can be suppressed by the introduction of dilute H-2 carrier gas.
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