期刊
ACS NANO
卷 13, 期 11, 页码 12408-12414出版社
AMER CHEMICAL SOC
DOI: 10.1021/acsnano.9b05781
关键词
nanoparticles; arrays; nanoreactor; anisotropic; dewetting; nanofabrication
类别
资金
- Sherman Fairchild Foundation, Inc.
- National Science Foundation [IIP-1621773]
- National Science Foundation under RAISE Award [CMMI-1848613]
- National Science Foundation through the National Science Foundation Graduate Research Fellowship Program [DGE-1842165]
- Soft and Hybrid Nanotechnology Experimental (SHyNE) resource [NSF ECCS-1542205]
- MRSEC program at the Materials Research Center [NSF DMR1121262]
- International Institute for Nanotechnology (IIN)
- Keck Foundation
- State of Illinois through the IIN
This work reports a massively parallel approach for synthesizing inorganic nanoparticles (Au, Ag, Se, and mixed oxides of Cu, Co, Ni, Ge, and Ta) based upon lithographically generated arrays of square pyramidal nanoholes, which serve as nanoreactors. Particle precursor-containing polymers are spin-coated onto the nanoreactors, which upon dewetting generate a morphology of isolated polymer droplets in each nanoreactor. This dewetting process yields a welldefined and precisely controlled volume of polymer and therefore particle precursor in each nanoreactor. Subsequent stepwise annealing (first at 150 degrees C and then at 500 degrees C) yields arrays of monodisperse, site -isolated particles with sub -5 nm position control. By varying the precursor loading of the polymer, particle size can be systematically controlled in the 7-30 nm range. This work not only introduces the concept of merging block copolymer inks with nanohole arrays in the synthesis of nanoparticles but also underscores the value of the nanoreactor shape in controlling resulting particle position.
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