Optimization of Surface Treatment of MEMS Probes for Single-cell Capture and Release

Micro-electromechanical system (MEMS) tweezers developed for the trapping and characterization of biomolecules such as DNA are also capable of cell handling, which will enable further application involving single-cell characterization. However, cellular adhesion to Si tweezer surfaces can inhibit the release of cells after capture and analysis. To realize high-throughput cell handling, the surface modification process for probe sidewalls was optimized. The hydrophilicity of sample silicon wafers modified with various chemical coatings was measured to identify the optimal process. The surface modification was then applied to MEMS probes and the feasibility of cell capture/release was evaluated.