期刊
SENSORS
卷 19, 期 19, 页码 -出版社
MDPI
DOI: 10.3390/s19194231
关键词
microsupercapacitors; energy storage; self-powering systems; IoT; sensor networks
资金
- Vinnova UDI-2: Miniaturized self-powered industrial sensor systems using energy harvesting technologies [2017-03725]
- Vinnova project NFFP7: Architecture for high-power radars [2017-04869]
- Chalmers Foundation
- Helge Ax:son Johnsons stiftelse [F19-0050]
- Area of Advance-Project MESSIAH: Microelectronic Energy Storage Systems Integrated Alongside Harvesters
There is an urgent need to fulfill future energy demands for micro and nanoelectronics. This work outlines a number of important design features for carbon-based microsupercapacitors, which enhance both their performance and integration potential and are critical for complimentary metal oxide semiconductor (CMOS) compatibility. Based on these design features, we present CMOS-compatible, graphene-based microsupercapacitors that can be integrated at the back end of the line of the integrated circuit fabrication. Electrode materials and their interfaces play a crucial role for the device characteristics. As such, different carbon-based materials are discussed and the importance of careful design of current collector/electrode interfaces is emphasized. Electrode adhesion is an important factor to improve device performance and uniformity. Additionally, doping of the electrodes can greatly improve the energy density of the devices. As microsupercapacitors are engineered for targeted applications, device scaling is critically important, and we present the first steps toward general scaling trends. Last, we outline a potential future integration scheme for a complete microsystem on a chip, containing sensors, logic, power generation, power management, and power storage. Such a system would be self-powering.
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