4.6 Article

Evaluation of surface and subsurface damages for diamond turning of ZnSe crystal

期刊

OPTICS EXPRESS
卷 27, 期 20, 页码 28364-28382

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OPTICAL SOC AMER
DOI: 10.1364/OE.27.028364

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资金

  1. National Natural Science Foundation of China [51175416, 51675420, 61805048]
  2. National Key Research & Development (R& D) Program of China [2016YFB0501604-02]
  3. Natural Science Foundation of Guangdong Province [2018A030310599]
  4. China Scholarship Council [201806280178]
  5. National Institutes of Health [S10OD0018061]

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With single-point diamond turning (SPDT), a series of samples are processed under different cutting parameters. The brittle-ductile transition depth of ZnSe crystal is obtained, and the damages of the samples are measured from surface and subsurface damage depths as well as damage density. The effects of cutting parameters on the damages are investigated quantitatively. The results show the cutting depth has a minor while the feed has a major effects on the damages. Also, the interaction effect between feed and cutting depth is very small for surface damage depth or damage density, while it is large for subsurface damage depth. Based on the indentation mechanics and the kinetic characteristics of SPDT, a model is proposed to evaluate the surface and subsurface damage depths of ZnSe crystal by cutting parameters. The model has an average relative error less than 15.0%, which could be further used to obtain the depth and the removal characteristics of cracks in shoulder region. (C) 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement

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