期刊
JOURNAL OF THE AMERICAN CERAMIC SOCIETY
卷 103, 期 2, 页码 1209-1218出版社
WILEY
DOI: 10.1111/jace.16815
关键词
barium titanate; perovskites; sol-gel; thin films
资金
- Air Force Office of Scientific Research [FA9550-18-1-0053]
- National Research Foundation of Korea [2018K1A4A3A01064272]
- National Science Foundation Graduate Research Fellowship [DGE-1610403]
- National Research Foundation of Korea [2018K1A4A3A01064272] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
Recent progress in the integration of BaTiO3 thin films with silicon has shown great promise for the development of on-chip photonic devices. However, the highest performing thin films in the literature are deposited by costly and/or complex vacuum techniques. In this study, epitaxial BaTiO3 thin films are deposited on thin SrTiO3 template layers on Si(001) from an alkoxide-based chemical solution under atmospheric conditions and yield an effective Pockels coefficient of 27 +/- 4 pm/V for an similar to 85 nm film. Film crystallinity, microstructure, and defect nature are examined by X-ray diffraction and high-resolution transmission and scanning electron microscopy techniques and discussed within the context of the growth method as well as the observed electro-optical response.
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