4.6 Article

Substrate effects on the CVD growth of MoS2 and WS2

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JOURNAL OF MATERIALS SCIENCE
卷 55, 期 3, 页码 990-996

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SPRINGER
DOI: 10.1007/s10853-019-03993-9

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资金

  1. National Natural Science Foundation of China [51701177, 51771170]
  2. Yunnan Applied Basic Research Project [2017FB080, 2018FB090]

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Chemical vapor deposition (CVD)-grown 2D materials like MoS2 and WS2 have been widely used for research and application. Here, we study substrates' effects on CVD-grown MoS2 and WS2. The morphology, crystalline quality and optical properties have been modified while changing substrates, which can be derived from lattice matching between 2D materials and substrate, defect/impurities on the interface and conductance/transparency of different substrates. The results provide suggestion for further study in CVD growth of 2D materials and device fabrications.

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