期刊
IEEE SENSORS JOURNAL
卷 19, 期 17, 页码 7479-7488出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JSEN.2019.2913459
关键词
MEMS; magnetic sensor; magnetometer; Lorentz force; offset suppression; digital control
资金
- Spanish Ministry of Science and Innovation
- European Social Fund (ESF) [TEC2015-67278-R]
- Secretaria d'Universitats i Recerca del Departament d'Empresa i Coneixement de la Generalitat de Catalunya
- ESF
This paper presents a mixed-signal closed-loop control system for Lorentz force resonant MEMS magnetometers. The control system contributes to 1) the automatic phase control of the loop, that allows start-up and keeps self-sustained oscillation at the MEMS resonance frequency, and 2) output offset reduction due to electrostatic driving by selectively disabling it. The proposed solution proof-of-concept has been tested with a Lorentz force-based MEMS magnetometer. The readout electronic circuitry has been implemented on a printed circuit board with off-the-shelf components. Digital control has been implemented in an FPGA coded with VHDL. When biased with 1 V and a driving current of 300 mu A(rms), the device shows 9.75 pA/mu T sensitivity and total sensor white noise of 550 nT root Hz. Offset when electrostatic driving is disabled is 793 mu T, which means a 40.1% reduction compared when electrostatic driving is enabled. Moreover, removing electrostatic driving does not worsen bias instability, which is lower than 125 nT in both driving cases.
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