期刊
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS
卷 25, 期 5, 页码 -出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JSTQE.2019.2906270
关键词
Indium-phosphide; PIC foundries; photonic integrated circuits; III-V
资金
- U.S. Department of Defense under the AIM Photonics Institute, Air Force [FA8650-15-2-5220]
We review the state-of-the-art in monolithic-integrated InP-based system-on-chip (SOC) photonic integrated circuits (PICs) and the extension of this capability to a foundry offering. The learnings and best practices embodied in the design and fabrication capability of commercially deployed monolithically integrated coherent optical communication SOC are leveraged to develop an optimized and scalable integration platform for a turnkey foundry process. The design automation and infrastructure required to enable a consistent reproducible InP-based foundry offering is summarized.
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