期刊
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS
卷 25, 期 5, 页码 -出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JSTQE.2019.2902903
关键词
Photonic integration; silicon nitride; generic technology; foundry model; open access; silicon photonics; multi-project wafer; visible light; near-infrared; mid-infrared; tele/data-com; bio/life sciences; environmental sensing; automotive
资金
- Spanish MINECO [TEC2016-80385-P SINXPECT]
- EC [H2020-ICT-27-2015 PICs4all CSA 687777]
- DARPA DODOS program
- PIX4life [IP 688519]
- [TEC2014-54449-C3-1-R]
- [H2020-ICT-2017-1 MOICANA RIA 780537]
- [PTQ-15-07966]
- [DI-15-08031]
- [BES-2014-068523]
- [PTA2015-11309-I]
Photonic integration technologies have spread in the past decade by means of foundry models that mirror the electronic-integrated circuit industry developments of the past century. Several monolithic technologies exist, based on silicon and III-V semiconductors. In this paper, we discuss the current state and forthcoming developments of open access photonic foundries whose technology platforms are based on silicon nitride material. The paper presents various silicon nitride technologies and foundries, alongside with access models supported by generic integration and process design kits. Technical features, enabled by different micro-fabrication processes and tools are summarized. Application examples and developments of forthcoming incorporation into these platforms are outlined.
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