4.7 Article

Porous Si/SnO2 nanowires heterostructures for H2S gas sensing

期刊

CERAMICS INTERNATIONAL
卷 46, 期 1, 页码 604-611

出版社

ELSEVIER SCI LTD
DOI: 10.1016/j.ceramint.2019.09.010

关键词

Porous Si; SnO2 NWs; H2S gas; Gas sensor; Sensing mechanism

资金

  1. Basic Science Research Program through the National Research Foundation of Korea (NRF) - Ministry of Education [2016R1A6A1A03013422]

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In this work, a low-temperature (100 degrees C) gas sensor based on heterojunctions of porous Si and SnO2 nanowires (NWs) is presented. Porous Si was obtained from p-Si wafers by electrochemical etching, and SnO2 NWs were fabricated by a vapor-liquid-solid route. Different characterization techniques were used to verify the formation of porous Si/SnO2 NW heterojunctions. H2S gas sensing results showed enhanced gas sensing performance of the porous Si/SnO2 NW sensor in comparison with that of a porous Si sensor. The reasons for such enhancement are discussed in detail. This study demonstrates the promising effects of SnO2 NWs in combination with porous Si to realize low-temperature H2S gas sensors that are highly compatible with existing Si processing technology.

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