期刊
PHYSICAL REVIEW MATERIALS
卷 3, 期 7, 页码 -出版社
AMER PHYSICAL SOC
DOI: 10.1103/PhysRevMaterials.3.073403
关键词
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资金
- GRO functional oxides project from the Samsung Advanced Institute of Technology
- National Science Foundation [Platform for the Accelerated Realization, Analysis, and Discovery of Interface Materials (PARADIM)] [DMR-1539918]
- Department of Defense Air Force Office of Scientific Research [FA 9550-16-1-0305]
- NSF MRSEC program [DMR-1719875]
- Cornell University
- Kavli Institute at Cornell
- NSF [ECCS-15420819]
- NSF Ceramics [1610844]
- Weill Institute
- National Science Foundation [DMR-1332208]
- [NSF-MRI-1429155]
The structural perfection and defect microstructure of epitaxial (001) SrTiO3 films grown on (001) Si was assessed by a combination of x-ray diffraction and scanning transmission electron microscopy. Conditions were identified that yield 002 SrTiO3 rocking curves with full width at half-maximum below 0.03 degrees for films ranging from 2 to 300 nm thick, but this is because this particular peak is insensitive to the similar to 8 x 10(11) cm(-2) density of threading dislocations with pure edge character and extended defects containing dislocations and out-of-phase boundaries. Our results show that one narrow rocking curve peak is insufficient to characterize the structural perfection of epitaxial films.
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