期刊
SENSORS AND ACTUATORS A-PHYSICAL
卷 292, 期 -, 页码 39-51出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/j.sna.2019.04.006
关键词
Piezoelectric actuator; Large working stroke; Stepping motion principle; Compliant mechanism
资金
- Zhejiang Provincial Natural Science Foundation of China [LY19E050010, LY18E050012]
- National Natural Science Foundation of China [51705197]
- Young Elite Scientists Sponsorship Program by CAST(YESS) [2017QNRC001]
- Fundamental Research Funds for the Central Universities
Precision positioning systems with large working stroke (millimeter or more) and micro/nano-scale positioning resolution are widely required in both scientific research and industries. For this kind of applications, piezoelectric materials based actuators show unique advantages and have been widely employed. To overcome the demerit of the limited working stroke for single piezoelectric element, various stepping motion principles have been proposed in the past years, and accordingly, stepping piezoelectric actuators with various structures have been designed and evaluated. This review is aimed to summarize the recent developments and achievements in stepping piezoelectric actuators with large working stroke. Especially, the emphasis is on three main types of stepping piezoelectric actuators, i.e., inchworm type, friction-inertia type, and parasitic type. The motion principles of these three types of piezoelectric actuators and the corresponding developments of various actuators are discussed respectively, followed by pointing out the existing problems in these three types of piezoelectric actuators and proposing some potential research directions in this topic. It is expected that this review is helpful for relevant researchers to understand stepping motion principles as well as piezoelectric actuators, and to successfully select and design stepping piezoelectric actuators for specific applications. (C) 2019 Elsevier B.V. All rights reserved.
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