期刊
PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE
卷 216, 期 21, 页码 -出版社
WILEY-V C H VERLAG GMBH
DOI: 10.1002/pssa.201900244
关键词
diamond growth; high growth rate; hot-filament chemical vapor deposition; tantalum filament
资金
- JSPS KAKENHI [17H02786]
- Osawa Scientific Studies Grants Foundation
- Kanazawa University SAKIGAKE Project 2018
- Adaptable and Seamless Technology Transfer Program through target-driven RD, JST
- Grants-in-Aid for Scientific Research [17H02786] Funding Source: KAKEN
Single-crystalline (100) diamond films are grown using hot-filament chemical vapor deposition at 3000 degrees C for the first time, which is achieved using tantalum filaments. A high growth rate of 10 mu m h(-1) is achieved, which is approximate to 50 times faster than that achieved at 2000 degrees C. The Raman spectrum of the diamond film grown at high rate shows a peak at 1333 cm(-1) with a full-width at half-maximum of 2.8 cm(-1), which is comparable with that of the seed substrate (2.7 cm(-1)). The surfaces of grown films are smooth, without hillocks or nonepitaxial crystallites.
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