期刊
OPTICS EXPRESS
卷 27, 期 14, 页码 19448-19462出版社
OPTICAL SOC AMER
DOI: 10.1364/OE.27.019448
关键词
-
类别
资金
- Chinese Ministry of National Science and Technology Program [2016YFF0102006, 2016YFF0103304]
- National Natural Science Foundation of China (NSFC) [61605204, 61505204]
- Youth Innovation Promotion Association of CAS [2015174]
A concept for position adjustment of the diamond in a ruling engine to enable nanoscale groove positioning is proposed. Based on this concept, we fabricate a diamond carriage, design an optical path, and propose an appropriate control method. Several high-quality gratings are ruled for spectrometer or interferometer applications. After implementation of the improvements, the maximum intensity of ghosts and scattered light of the echelle grating with 79 grooves/mm is reduced to half of that before the improvement, and the highest achievable groove density is increased from 6000 grooves/mm to 8000 grooves/mm. The grating ruling results indicate that the proposed concept and the related improvements to the engine significantly improve the accuracy of the CIOMP-6 ruling engine. (c) 2019 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据