期刊
JOURNAL OF SURFACE INVESTIGATION
卷 13, 期 3, 页码 562-565出版社
PLEIADES PUBLISHING INC
DOI: 10.1134/S1027451019030339
关键词
ion bombardment; sputtering; sputtering yield; amorphous target; computer simulation; program SRIM
The computer simulation program SRIM, unlike other well-known programs (MARLOWE, TRIM.SP, etc.), predicts non-zero values of the sputtering yield in the case of glancing ion bombardment of smooth amorphous targets. To understand the reason for this and other differences, simulation of the sputtering of a germanium target bombarded with 0.1-10-keV ions is carried out using the OKSANA program. It is shown that SRIM insufficiently correctly simulates the initial stage of the sputtering process.
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