期刊
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
卷 28, 期 3, 页码 550-557出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2019.2902757
关键词
Microelectromechanical systems (MEMS); 2D materials; strain engineering; thermal management; Raman spectroscopy; IR thermometry; finite element simulation
类别
资金
- National Science Foundation Division of Materials Research [1411008]
- Engineering Research Centers Program of the National Science Foundation through the NSF Cooperative Agreement [EEC-0812056, EEC-1647837, ECCS-1708283]
- Division Of Materials Research
- Direct For Mathematical & Physical Scien [1411008] Funding Source: National Science Foundation
We present electrothermal microelectromechanical (MEMS) actuators as a practical platform for straining 2-D materials. The advantages of the electrothermal actuator are its high output force and displacement for low input voltage, but its drawback is that it is actuated by generating high amounts of heat. It is crucial to mitigate the high temperatures generated during actuation for reliable 2-D material strain device implementation. Here, we implement a chevron actuator design that incorporates a thermal isolation stage in order to avoid heating the 2-D material from the high temperatures generated during the actuation. By comparing the experiment and simulation, we ensure our design does not compromise output displacement while keeping the 2-D material strain device stage cool. We also provide a simple analytical model useful for quickly evaluating different thermal isolation stage designs.
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