期刊
APPLIED PHYSICS LETTERS
卷 108, 期 12, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.4944860
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资金
- Deutsche Forschungsgemeinschaft [Sonderforschungsbereich 762]
- Universitat Leipzig
UV and deep-UV selective photodiodes from visible-blind to solar-blind were realized based on a Si-doped (InxGa1-x)(2)O-3 thin film with a monotonic lateral variation of 0.0035 < x < 0.83. Such layer was deposited by employing a continuous composition spread approach relying on the ablation of a single segmented target in pulsed-laser deposition. The photo response signal is provided from a metal-semiconductor-metal structure upon backside illumination. The absorption onset was tuned from 4.83 to 3.22 eV for increasing x. Higher responsivities were observed for photodiodes fabricated from indium-rich part of the sample, for which an internal gain mechanism could be identified. (C) 2016 AIP Publishing LLC.
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