On reduction of current leakage in GaN by carbon-doping

Carbon-doping is proposed to reduce the dislocation-mediated leakage currents in the GaN buffer layers. GaN:C grown by metalorganic vapor phase epitaxy using propane shows excellent quality up to [C] = 6.7 x 10(18) cm(-3). Locally probing dislocations by surface scanning potential microscopy reveal a transition from mostly neutral or weakly charged regions to dominantly negatively charged regions relative to the surrounding area at high doping levels. A relation between leakage currents and the relative dislocation charge state exists. Minimum leakage current is achieved if the dominant charge state of dislocation regions becomes negative against the surrounding. Published by AIP Publishing.