期刊
APPLIED PHYSICS LETTERS
卷 109, 期 14, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.4963784
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资金
- state budget of the Czech Republic [LO1602]
- U.S. National Science Foundation (CBET) [1336111]
- Div Of Chem, Bioeng, Env, & Transp Sys
- Directorate For Engineering [1336111] Funding Source: National Science Foundation
Silicon is one of the most abundant materials which is used in many areas of modern research and technology. A variety of those applications require surface nanopatterning with minimum structure defects. However, the high-quality nanostructuring of large areas of silicon surface at industrially acceptable speed is still a challenge. Here, we report a rapid formation of highly regular laser-induced periodic surface structures (HR-LIPSS) in the regime of strong ablation by infrared femto-second laser pulses at sub-MHz repetition rate. Parameters of the laser-surface interactions and obtained experimental results suggest an important role of electrostatically assisted bond softening in initiating the HR-LIPSS formation. Published by AIP Publishing.
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