期刊
APPLIED PHYSICS LETTERS
卷 109, 期 22, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.4971334
关键词
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资金
- National Science Foundation of China (NSFC) [61475124, 61275008, 51335008, 61405154]
- Special-funded program on national key scientific instruments and equipment development of China [2012YQ12004706]
- China Postdoctoral Science Foundation [2014M562414]
- Collaborative Innovation Center of Suzhou Nano Science and Technology
- International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies
We report a direct fabrication of an omnidirectional negative microlens array on a curved substrate by a femtosecond laser enhanced chemical etching process, which is utilized as a molding template for duplicating bioinspired compound eyes. The femtosecond laser treatment of the curved glass substrate employs a common x-y-z stage without rotating the sample surface perpendicular to the laser beam, and uniform, omnidirectional-aligned negative microlenses are generated after a hydrofluoric acid etching. Using the negative microlens array on the concave glass substrate as a molding template, we fabricate an artificial compound eye with 3000 positive microlenses of 95-mu m diameter close-packed on a 5-mm polymer hemisphere. Compared to the transferring process, the negative microlenses directly fabricated on the curved mold by our method are distortion-free, and the duplicated artificial eye presents clear and uniform imaging capabilities. This work provides a facile and efficient route to the fabrication of microlenses on any curved substrates without complicated alignment and motion control processes, which has the potential for the development of new microlens-based devices and systems. Published by AIP Publishing.
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