期刊
APPLIED PHYSICS LETTERS
卷 108, 期 16, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.4947444
关键词
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资金
- JST Collaborative Research Based on Industrial Demand
- KAKENHI from JSPS [15K13966]
- Project for Developing Innovation Systems of MEXT
- Grants-in-Aid for Scientific Research [15K13966, 15H05868] Funding Source: KAKEN
We propose a room temperature, all electrical driving and detecting, very sensitive thermometer structure using a microelectromechanical (MEMS) resonator for bolometer applications. We have fabricated a GaAs doubly clamped MEMS beam resonator whose oscillation can be excited and detected by the piezoelectric effect. When a heating power is applied to a NiCr film deposited on the MEMS beam surface, internal thermal stress is generated in the beam, leading to a reduction in the resonance frequency. The present device detects the shift in the resonance frequency caused by heating and works as a very sensitive thermometer. When the resonator was driven by a voltage slightly below the threshold for the nonlinear, hysteretic oscillation, the thermometer showed a voltage responsivity of about 3300 V/W, while keeping a low noise spectral density of about 60 nV/Hz(1/2), demonstrating a noise equivalent power of <20 pW/Hz(1/2) even at room temperature. The observed effect can be used for realizing high-sensitivity terahertz bolometers for room-temperature operation. Published by AIP Publishing.
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