期刊
APPLIED PHYSICS LETTERS
卷 109, 期 2, 页码 -出版社
AMER INST PHYSICS
DOI: 10.1063/1.4955477
关键词
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资金
- National Natural Science Foundation of China [51275502, 61475149, 51405464, 91223203, 11204250]
- Anhui Provincial Natural Science Foundation [1408085ME104]
- National Basic Research Program of China [2011CB302100]
- Fundamental Research Funds for the Central Universities [WK2090090012, WK6030000004]
In this letter, we report an improved algorithm to produce accurate phase patterns for generating highly uniform diffraction-limited multifocal arrays in a large numerical aperture objective system. It is shown that based on the original diffraction integral, the uniformity of the diffraction-limited focal arrays can be improved from similar to 75% to > 97%, owing to the critical consideration of the aperture function and apodization effect associated with a large numerical aperture objective. The experimental results, e.g., 3 x 3 arrays of square and triangle, seven microlens arrays with high uniformity, further verify the advantage of the improved algorithm. This algorithm enables the laser parallel processing technology to realize uniform microstructures and functional devices in the microfabrication system with a large numerical aperture objective. Published by AIP Publishing.
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