期刊
APPLIED PHYSICS EXPRESS
卷 9, 期 6, 页码 -出版社
IOP PUBLISHING LTD
DOI: 10.7567/APEX.9.061102
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资金
- Air Force Office of Scientific Research (AFOSR) [FA9550-14-1-0112]
- MRSEC Program of the U.S. National Science Foundation [DMR-1121053]
We demonstrate X-ray-diffraction-based composition estimation of beta-(AlxGa1-x)(2)O-3 coherently grown on (010) beta-Ga2O3. The relation between the strain along the [010] direction and the Al composition of the beta-(AlxGa1-x)(2)O-3 layer was formulated using the stress-strain relationship in the monoclinic system. This formulation allows us to estimate the Al composition using the out-of-plane lattice spacing determined by conventional X-ray omega-2 theta. measurements. This method was applied to molecular-beam-epitaxy-grown coherent beta-(AlxGa1-x)(2)O-3/Ga2O3 heterostructures, and the Al composition in beta-(AlxGa1-x)(2)O-3 agrees closely with the composition determined directly by atom probe tomography. (C) 2016 The Japan Society of Applied Physics
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