期刊
IEEE SENSORS JOURNAL
卷 19, 期 13, 页码 4857-4865出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JSEN.2019.2904119
关键词
Two dimensional displacement; inductive sensor; spiral coils; travelling wave magnetic field; clock interpolation
资金
- National Natural Science Foundation of China [51675071]
- Scientific and Technological Research Program of Chongqing Municipal Education Commission [KJ1709191]
- Chongqing Technological Program [cstc2017jcyjA0814]
Precision measurement of two-dimensional displacements is needed in many domains, such as precision fabrication and detection. This paper presents a novel inductive position sensor with the capability of measuring displacements in x- and y-directions simultaneously. The sensor consists of two parts: a ferromagnetic plate with primary windings that are composed of four layers of spiral coils and a ferromagnetic plate with secondary windings that are composed of four layers of spiral coils. Primary windings are supplied with two quadrature 20-kHz alternating current to generate traveling wave magnetic field along x- and y-directions separately. Secondary windings output two signals whose phases are proportional to the linear displacements in x- and y-directions, respectively. The structure and working principles of the sensor are proposed. Meanwhile, a sensor model is simulated to verify the feasibility of the sensor, and a sensor prototype is fabricated for physical experiment. According to the analysis of the experimental results, the measurement range is up to 140 mm x 140 mm, and the maximum linearity in one pitch is 1%. In addition, measurement errors show that the performance of sensor may be improved by optimizing the layout of primary and secondary windings and signal processing circuit.
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