期刊
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
卷 122, 期 4, 页码 -出版社
SPRINGER HEIDELBERG
DOI: 10.1007/s00339-016-9953-6
关键词
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资金
- UK Engineering and Physical Sciences Research Council (EPSRC) [EP/L022230/1, EP/J008052/1]
- EPSRC [EP/L022230/1, EP/J008052/1, EP/N03368X/1] Funding Source: UKRI
- Engineering and Physical Sciences Research Council [EP/L022230/1, EP/J008052/1, 1375543] Funding Source: researchfish
Femtosecond laser-induced backward transfer of transparent photopolymers is demonstrated in the solid state, assisted by a digital micromirror spatial light modulator for producing shaped deposits. Through use of an absorbing silicon carrier substrate, we have been able to successfully transfer solid-phase material, with lateral dimensions as small as similar to 6 mu m. In addition, a carrier of silicon incorporating a photonic waveguide relief structure enables the transfer of imprinted deposits that have been accomplished with surface features exactly complementing those present on the substrate, with an observed minimum feature size of 140 nm.
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