Highly Sensitive Piezoresistive Sensor Based on Modified Polystyrene Microsphere Multi-layer Stacking Conductive Interface

A novel piezoresistive pressure sensor based on silver-coated polystyrene (Ag@PS) microspheres filled in a poly-dimethylsiloxane (PDMS) substrate with a cavity was successfully manufactured. This sensor possesses ultrahigh sensitivity of 33.8 kPa(-1), fast response time of 96 ms, low limit of detection (LOD) of 3 Pa, excellent cycle stability of 5000 cycles, and wide detection range (3 Pa-60 kPa). Moreover, we have further explored the practical applications of this pressure sensor in electronic skin.